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Solid-state microwave (2.45GHz) pulsed generator for plasma

LPSC developed an ECR  dipolar plasma source, and a microwave generator powered by a steady state module. The Compact, highly versatile and robust/reliable device offered works on DC mode, or pulsed mode and presents several advantages, such as high stability over a wide range of experimental conditions while recreating a plasma-surface interaction very close to that obtained in a full-scale ion source. The technology is relevant for big science infrastructures to improve the understanding and knowledge about plasma chemistry or in any industry application requiring a smooth surface treatment.

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